Thin Film Deposition System
Product Details:
A series of large deposition systems with 2 process chambers and a one transfer chamber, also used as a load-lock system. Built on a self-contained frame, with “Through the Wall” design, TFDS-462U series perfectly fits cleanrooms and clean production floor environments. It is fully assembled and shipped in one piece to decrease installation time and provide comprehensive solution in the smallest available footprint essential for clean room and production application.