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MicroLine 300

MicroLine 300

Product Details :

  • The VIEW MicroLine® is a high-performance critical dimensional measurement system designed to measure wafers, masks, MEMS and other micro-fabricated devices in situations which do not require fully automated operation.
  • MicroLine systems feature the highest quality microscope optics, manually operated stages and programmable light intensity. MicroLine systems are robust and capable of measuring transparent layers, lines with irregular edge and other critical features.


StandardOptional
X,Y,Z Measuring Range (mm)200x200300x300
Z Focusing Range (mm)25
XY StageCross roller with manual coaxial positioning and quick releaseGlass stage insert for use with transmitted light
Imaging OpticsOlympus Microscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret, tilt trinocular with eyepieces, and standard camera mounting tube
Front Lens (Field Interchangable)Full spectrum, programmable tungsten halogen coaxial surface lightFull spectrum, programmable tungsten halogen transmitted light with adjustable N.A. stop
Sensor OptionsThrough-the-lens (TTL) laser Spectra Probe white light range sensor Off-axis triangulation laser
Measurement ModesHigh Speed Move and Measure (MAM)Continuous Image Capture (CIC)

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MicroLine 300

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