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Precis 200

Precis 200

Product Details :

  • The all-new Precis® 200 incorporates the most advanced design and technology from VIEW. Based on the proven Innova wafer metrology system from Micro-Metric, the new Precis includes a number of configurable options that make the system more versatile, serviceable and reliable:
  • State-of-the-art linear motion control technology provides the fastest, most reliable platform available for high capacity operation in production environments ranging from clean rooms to factory floors.


  • Extended Z-axis range – 2.5mm, 5mm or 100mm
  • Integral electronics drawer – fully compliant with SEMI S2 and CE standards
  • Ergonomic operator control station with hide-away keyboard tray, adjustable height and angle for control panel and display monitor, SEMI S8 compliant
  • Fully automated microscope with all settings computer controlled
  • MMWin – wafer and mask metrology software – ideal for critical dimension and overlay registration measurement for wafers, slider ABS, photomask and flat panel displays.



StandardOptional
X,Y,Z Travel200x200x5 mm
Load Capacity12 kg
Imaging OpticsMicroscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret, and camera back tube
Front Lens (Field Interchangable)10X Bright Field 50X Long Working Distance, Bright Field5X Bright Field or Bright Field/Dark Field 10X Bright Field or Bright Field/Dark Field 20X Long Working Distance, Bright Field or Bright Field/Dark Field 50X Long Working Distance, Bright Field or Bright Field/Dark Field
Metrology Camera1.4 megapixel, 1/2 inch, digital monochrome2.0 megapixel, digital, monochrome
IlluminationAll LED coaxial through-the-lens surface light and below-the-stage back lightMulti-color programmable ring light Grid autofocus system
Sensor OptionsIntegrated photo spectrometer for photoresist and thin film thickness measurements

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Precis 200

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